The Knut and Alice Wallenberg Foundation has recently approved a donation of 30 million SEK for research equipment to Lund University. The new epitaxial cluster tool, where tools are connected by an ultra-high vacuum compatible transfer system, will offer the unique possibility to protect a critical surface from oxidation between different processing and characterization steps. This enables enhanced electronic device performance as well as the possibility to assess fundamental aspects of surface preparation and its effects on further processing. The new equipment will become part of the equipment available at Lund Nano Lab which is an open facility for other academic groups at Lund University as well as for external academic groups and corporate users. The equipment is nationwide available through the Myfab collaboration.
Page Manager: Line Lundfald
Last updated: 2013-05-17