Lectures
Lecture 1:
Zheng Cui, Nanofabrication. Principles, Capabilities and Limits, Springer 2008
To read and understand: Electron Beam Lithography: Chapter 3, parts 3.1, 3.2 (except for 3.2.2.2), 3.3 (except for 3.3.5), 3.6.
Zheng Cui, Nanofabrication. Principles, Capabilities and Limits, Springer 2017 (this edition is highly recommended!)
To read and understand: Chapter 3. Nanofabrication by Electron Beam (except for 3.5)
Lecture 3:
Zheng Cui, Nanofabrication. Principles, Capabilities and Limits, Springer 2017: Chapter 6: Nanofabrication by Replication
or
Zheng Cui, Nanofabrication. Principles, Capabilities and Limits, Springer 2008: Chapter 5: Nanofabrication by Replication (except for 5.6.2 and 5.6.3)
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