2020-01-27 Please use the CANVAS platform to access the course material.
Course code: FFFN01 (Faculty of Engineering) and FYST31 (Natural Science Faculty)
Course responsible: Ivan Maximov, Lund Nano Lab, Division of Solid State Physics, Lund University, Box 118, S-221 00, Lund, Sweden
The aim of the course is to give a basic knowledge of a modern research-grade cleanroom, different methods of semiconductor nanofabrication and some practical experience how to make and characterise nanostructures. The participants of the course will use our modern cleanroom facility (Lund Nano Lab) for processing of nanostructures and take part in the course projects, which are closely connected to our research. The course yields 7.5 ECTS credits and is given 2 times a year. Please note that the number of students is limited to 12.
The course consists of the following parts:
- Lectures (given in the beginning of the course, during the first 2 - 3 weeks)
- Laboratory work in small subgroups, 3 persons per group
- Written examination
- Project work, usually related to research activity at the Division of Solid State Physics, Lund University
- Presentation of the project work at a "mini-conference" and the final project report
Apart from the lectures notes and the selected review articles (see the Lectures section), the following books are recommended:
- Zheng Cui, Nanofabrication: principles, capabilities and limits, 2-nd edition, 2017.
- M. Stepanova, S. Dew, eds. Nanofabrication. Techniques and principles, Springer, 2012
- W. Whyte, Cleanroom Technology, J. Wiley & sons, 2004
- S. Z. Sze, Semiconductor Devices. Physics and Technology, J. Wiley & sons
Schedule for VT 2020 - see CANVAS